Planar optical waveguides in Nd:BSO crystals fabricated by He and C ion implantation

Planar optical waveguides in Nd:BSO crystals were fabricated by the implantation of 500 keV He ions and 6.0 MeV C ions at two different substrate temperatures. The guiding modes were measured by the prism-coupling method with a He-Ne beam at 633 nm. The intensity calculation method (ICM) and reflectivity calculation method (RCM) were used for reconstructing refractive index profiles. The near-field intensity distribution of the waveguide, formed by He and C ions implanted after annealing at 300 °C, was measured by the end-face coupling setup. It was in reasonable agreement with the intensity of the waveguide mode simulated by the finite-difference beam propagation method (FD-BPM). The absorption spectra of the sample with He ions implanted at fluences of 3 × 10¹⁶ ions/cm² were measured using a spectrophotometer.