| IH工艺在微机械中的应用 |
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| 引用本文： | 崔天宏,汪洪涛.IH工艺在微机械中的应用[J].光学精密工程,1994,2(6):18-23. |
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| 作者姓名： | 崔天宏 汪洪涛 |
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| 作者单位： | 中国科学院长春光学精密机械研究所，吉林工业学院材料系 |
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| 摘 要： | 介绍了微机械加工中的一项崭新技术--IH工艺,即集成聚合物固化立体光刻。这一技术是具有大纵横比的真三维立体加工工艺,而且可以加工聚合物和金属等多种材料。最后作者把IH工艺同LIGA工艺等传统工艺方法加以类比,提出了IH工艺的应用前景。
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| 关 键 词： | IH工艺 微机械 立体光刻 |
| 收稿时间： | 1994-05-05 |
IH PROCESS IN THE APPLICATION OF MEMS |
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| Cui Tianhong,Wang Liding,Lu Qiongying and WangHongtao.IH PROCESS IN THE APPLICATION OF MEMS[J].Optics and Precision Engineering,1994,2(6):18-23. |
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| Authors: | Cui Tianhong Wang Liding Lu Qiongying and WangHongtao |
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| Affiliation: | 1. Changehun Institute of Optics ang Fine Meehanics, Chinese Aeademy of Sciences, Changchun 130021;2. Department of Material, Jilin College of Technology, Changchun 130012 |
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| Abstract: | This paper introduce a new technology in micro fabrication.This process named “IH Process(Integrated Harden Polymer Stereo Lithography)”is a technique for real three dimensional(3D)structure with high aspect ration,and suitable for both polymer and metals.Finally the authors contrast IH process to LIGA process,and put forward the good prospect of IH process. |
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| Keywords: | IH process MEMS Stereo Lithography |
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