| 10.6μm薄膜90°位相延迟片椭偏参数侧量方法的研究 |
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| 引用本文： | 戈兵.10.6μm薄膜90°位相延迟片椭偏参数侧量方法的研究[J].光学精密工程,1991,0(2):56-59. |
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| 作者姓名： | 戈兵 |
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| 摘 要： | 本文在旋转检偏器式椭偏仪原理的基础上,通过分析影响椭偏参数Ψ、Δ测量精度的主要因素,提出改进的测量方法,从理论上给出提高Ψ、Δ测量精度的途径,并得出了一些有价值的结论。
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A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm |
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| Ge Bing.A Study on the Measurement Method for Elliptical Polarization Parameters of 90°Thin Film Phase Retarder at 10.6μm[J].Optics and Precision Engineering,1991,0(2):56-59. |
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| Authors: | Ge Bing |
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| Abstract: | On the basic principle of rotating-analyzer ellipsometer,an improved measuring method is presented in this paper by analyzing the main facts which affect the measurement accuracy of elliptic polarization parameters Ψ and Δ.The method to increase the measurement accuracy of Ψ and Δ are given in theory,and some valable conclusions are given. |
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