| NV10-80大束流注入机离子源电路原理分析及维修经验浅谈 |
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| 引用本文： | 陆锋.NV10-80大束流注入机离子源电路原理分析及维修经验浅谈[J].微电子技术,2002,30(4):29-33. |
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| 作者姓名： | 陆锋 |
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| 作者单位： | 无锡微电子科研中心,无锡,214035 |
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| 摘 要： | 本文较为详细地分析了Eaton NV10-80大束流离子流入机离子源电路工作原理，包括ARC电压，灯丝电流，气源压力调节及固体源坩埚温度控制的电路工作原理，同时，又针对常用离子源故障解决作了剖析。由于Eaton NV10-80大束流离子注入机国内半导体厂家使用较为广泛，其它型号的离子注入机也可借鉴，本文有较高的实际指导意义。
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| 关 键 词： | NV10－80大束流注入机 离子源 电路原理 维修 ARC电源 灯丝电流 气源压力 坩埚温度 |
| 文章编号： | 1008-0147(2002)04-29-05 |
| 修稿时间： | 2002年4月8日 |
Analysis of Principle of Ion Source Circuits in NV10-80High Current Implanter and Discussion on Troubleshooting |
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| LU Feng.Analysis of Principle of Ion Source Circuits in NV10-80High Current Implanter and Discussion on Troubleshooting[J].Microelectronic Technology,2002,30(4):29-33. |
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| Authors: | LU Feng |
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| Abstract: | The operation principle of the ion source circuits in the Eaton NV10-80 high current implanter is described in detail, including ARC voltage, filament current, gas pressure regulation and vaporizer temperature control. At same time, some troubleshooting measures are described for the failures that often happen on the ion source. Since the Eaton NV10-80 high current implanters are widely used in many semiconductor manufacturers in our country, this paper is also instructive and of reference to other implanter models. |
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| Keywords: | ion source ARC voltage filament current gas pressure vaporizer temperature |
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