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采用源极增强带带隧穿热电子注入编程的新型p沟选择分裂位线NOR快闪存贮器
引用本文:潘立阳,朱钧,刘楷,刘志宏,曾莹.采用源极增强带带隧穿热电子注入编程的新型p沟选择分裂位线NOR快闪存贮器[J].半导体学报,2002,23(10).
作者姓名:潘立阳  朱钧  刘楷  刘志宏  曾莹
作者单位:清华大学微电子学研究所,北京,100084
摘    要:提出一种新型的PMOS选择分裂位线NOR结构快闪存贮器,具有高编程速度、低编程电压、低功耗、高访问速度和高可靠性等优点.该结构采用源极增强带带隧穿热电子注入进行编程,当子位线宽度为128位时,位线漏电只有3.5μA左右,每位编程功耗为16.5μW,注入系数为4×10-4,编程速度可达20μs,存贮管的读电流可达60μA/μm以上.分裂位线结构和低编程电压使得该结构具有很好的抗位线串扰特性和可靠性.

关 键 词:快闪存贮器  带带隧穿  分裂位线NOR  源极增强带带隧穿热电子注入  位线串扰

Novel p-Channel Selected n-Channel Divided Bit-Line NOR Flash Memory Using Source Induced Band-to-Band Hot Electron Injection Programming
Pan Liyang,Zhu Jun,Liu Kai,Liu Zhihong,Zeng Ying.Novel p-Channel Selected n-Channel Divided Bit-Line NOR Flash Memory Using Source Induced Band-to-Band Hot Electron Injection Programming[J].Chinese Journal of Semiconductors,2002,23(10).
Authors:Pan Liyang  Zhu Jun  Liu Kai  Liu Zhihong  Zeng Ying
Abstract:A novel p-channel selected n-channel divided bit-line NOR(PNOR) flash memory,which features low programming current,low power,high access current,and slight bit-line disturbance,is proposed.By using the source induced band-to-band hot electron injection (SIBE) to perform programming and dividing the bit-line to the sub-bit-lines,the programming current and power can be reduced to 3.5μA and 16.5μW with the sub-bit-line width equaling to 128,and a read current of 60μA is obtained.Furthermore,the bit-line disturbance is also significantly alleviated.
Keywords:flash memory  DINOR  band-to-band  SIBE  disturbance
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