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Electrothermally actuated resonant rate gyroscope fabricated using the MetalMUMPs |
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| Authors: | Rana I Shakoor Shafaat A Bazaz |
| Affiliation: | a Department of Chemical and Materials Engineering, Pakistan Institute of Engineering & Applied Sciences, P.O. Nilore, Islamabad, Pakistan b Faculty of Computer Science & Engineering, GIK Institute, Topi, Swabi, NWFP, Pakistan c Department of Mechanical Engineering, Queens University, Kingston, ON, Canada K7L3N6 |
| Abstract: | |
| Keywords: | Finite element method Micromachined Gyroscope MEMS Thermal V shaped actuator Chevron-shaped actuator |
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