| 多探针自动测试台的技术改造 |
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| 引用本文： | 吴小燕,柏正香,欧昌银.多探针自动测试台的技术改造[J].微电子学,2006,36(6):842-844. |
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| 作者姓名： | 吴小燕 柏正香 欧昌银 |
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| 作者单位： | 中国电子科技集团公司,第二十四研究所,重庆,400060 |
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| 摘 要： | 介绍了将测试75 mm圆片的多探针自动测试台改造为测试100 mm圆片的多探针测试台。在原设备的基础上,重新设计加工X轴和Y轴的丝杆和导轨及承片台,控制由TP801单板机改为80C32单片机,数码管显示改为彩色液晶屏显示。改造后的探针测试台只需一次对片就能测完100 mm圆片,且控制稳定,功能更加完善,使用更为方便。
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| 关 键 词： | 半导体测试设备 探针测试台 单片机控制 |
| 文章编号： | 1004-3365（2006）06-0842-03 |
| 收稿时间： | 2006-03-25 |
| 修稿时间： | 2006-03-252006-08-23 |
Renovation of a Multi-Probe Automatic Test Equipment |
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| WU Xiao-yan,BAI Zheng-xiang,OU Chang-yin.Renovation of a Multi-Probe Automatic Test Equipment[J].Microelectronics,2006,36(6):842-844. |
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| Authors: | WU Xiao-yan BAI Zheng-xiang OU Chang-yin |
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| Affiliation: | Sichuan Institute of Solid-State Circuits, China Electronics Technology Group Corporation, Chongqing 400060, P. R, China |
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| Abstract: | Transformation of a multi-probe automatic test equipment for 75 mm wafers into a 100 mm wafer test station is described.X and Y axes of guide screw/rail and wafer chuck are redesigned and machined.The main controller is substituted with an 80C32 microprocessor,and a 23 cm colored LCD is used to replace the digital tube display.With more functions and easier operation,the renovated probe station works in a very stable mode. |
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| Keywords: | Semiconductor test equipment Probe test station SCM control |
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