| THE USE OF MeV PROTON NON-RUTHERFORD ELASTIC BACKSCATTERING FOR THE ANALYSIS OF LOW Z ELEMENTS |
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| 引用本文： | 裘元勋,周筑颖,赵国庆,顾锡良,潘礼庆,杨家镛,杨福家. THE USE OF MeV PROTON NON-RUTHERFORD ELASTIC BACKSCATTERING FOR THE ANALYSIS OF LOW Z ELEMENTS[J]. 核技术(英文版), 1990, 0(4) |
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| 作者姓名： | 裘元勋 周筑颖 赵国庆 顾锡良 潘礼庆 杨家镛 杨福家 |
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| 作者单位： | Department of Nuclear Science Fudan University Shanghai 200433 China，Department of Nuclear Science Fudan University Shanghai 200433 China，Department of Nuclear Science Fudan University Shanghai 200433 China，Department of Nuclear Science Fudan University Shanghai 200433 China，Department of Nuclear Science Fudan University Shanghai 200433 China，Department of Nuclear Science Fudan University Shanghai 200433 China，Department of Nuclear Science Fudan University Shanghai 200433 China |
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| 摘 要： | ![]()
The MeV proton non- Rutherford elastic backscattering (PEBS) has been used to measure a variety of low Z element- containing samples including thick SiC film, N implanted stainless steel, thin films interface (Ag on Cu) and very deep (4μ m) SOI structure by high energy oxygen implantation. It is demonstrated that by using the significant enhancement of cross sections for low Z elements and selecting the proper energy region of the excitation curves both the sensitivities for detecting low Z elements and the accessible depth of the PEBS technique are remarkablely improved over the ordinary RBS method. The disadvantages of the PEBS as compared with RBS as well as high energy He elastic backscattering (HeEBS) are also discussed.
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THE USE OF MeV PROTON NON-RUTHERFORD ELASTIC BACKSCATTERING FOR THE ANALYSIS OF LOW Z ELEMENTS |
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| Qiu Yuanxun Zhou Zhuying Zhao GuoqingGu Xiliang Pan Liqing Tang Jiayongand Yang Fujia. THE USE OF MeV PROTON NON-RUTHERFORD ELASTIC BACKSCATTERING FOR THE ANALYSIS OF LOW Z ELEMENTS[J]. , 1990, 0(4) |
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| Authors: | Qiu Yuanxun Zhou Zhuying Zhao GuoqingGu Xiliang Pan Liqing Tang Jiayongand Yang Fujia |
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| Abstract: | ![]()
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| Keywords: | RBS MeV proton elastic backscattering for materials analysis |
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