| 锥形内表面干涉测量误差分析 |
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| 引用本文： | 黄欣,吴鹏,唐寿鸿,韩森,李雪园,王全召.锥形内表面干涉测量误差分析[J].光学仪器,2019,41(2):23-27. |
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| 作者姓名： | 黄欣 吴鹏 唐寿鸿 韩森 李雪园 王全召 |
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| 作者单位： | 上海理工大学 光电信息与计算机工程学院,上海 200093;苏州慧利仪器有限责任公司,江苏 苏州 215123;上海理工大学 光电信息与计算机工程学院,上海 200093;苏州慧利仪器有限责任公司,江苏 苏州 215123;苏州维纳仪器有限责任公司,江苏 苏州 215123 |
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| 基金项目： | 国家重点研发计划项目（2016YFF0101900） |
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| 摘 要： | 为了实现对回转锥形内表面的形貌精密测量,分析了干涉测量中误差产生的原因,明确了误差对测量结果造成的影响。通过在圆柱坐标系下建立数学模型,推导出偏移误差和角度误差的数学公式,并对误差公式进行分析。结果表明:圆锥反射镜的偏移量和顶角的加工误差都会造成光程差;当偏移量极小时,光程差与反射镜偏移量成线性关系;光程差对于角度误差非常敏感,为了保证测量精度,需要严格控制圆锥反射镜的顶角大小。
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| 关 键 词： | 干涉测量 锥形内表面 误差分析 |
| 收稿时间： | 2018/5/10 0:00:00 |
Error analysis of cone inner surface in the interferometric measurement |
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| HUANG Xin,WU Peng,TANG Shouhong,HAN Sen,LI Xueyuan and WANG Quanzhao.Error analysis of cone inner surface in the interferometric measurement[J].Optical Instruments,2019,41(2):23-27. |
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| Authors: | HUANG Xin WU Peng TANG Shouhong HAN Sen LI Xueyuan and WANG Quanzhao |
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| Affiliation: | School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;Suzhou H&L Instruments LLC., Suzhou 215123, China,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;Suzhou H&L Instruments LLC., Suzhou 215123, China,School of Optical-Electrical and Computer Engineering, University of Shanghai for Science and Technology, Shanghai 200093, China;Suzhou H&L Instruments LLC., Suzhou 215123, China,Suzhou H&L Instruments LLC., Suzhou 215123, China and Suzhou Weina Instrments LLC., Suzhou 215123, China |
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| Abstract: | To achieve high-precision cone inner surface measurement, it is necessary to identify the cause of error and analyze the influence of the error on the measurement result. By building the mathematical model in the cylindrical coordinate system, the formulas of offset error and angle error are derived. The result shows that the optical path difference is caused obviously by offset error and angle error of cone mirror. When the offset is extremely small, the optical path difference changes linearly with the offset. The optical path is very sensitive to angle error. To ensure the measurement accuracy, the apex angle of cone mirror must be strictly controlled. |
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| Keywords: | interferometric measurement conical frustum inner surface error analysis |
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