| 大量程纳米级垂直扫描系统研究 |
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| 引用本文： | 王淑珍,王生怀,谢铁邦.大量程纳米级垂直扫描系统研究[J].中国机械工程,2010(4). |
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| 作者姓名： | 王淑珍 王生怀 谢铁邦 |
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| 作者单位： | 华中科技大学;洛阳理工学院; |
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| 基金项目： | 国家863高技术研究发展计划资助项目(2008AA042409) |
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| 摘 要： | 研究开发了一种大量程纳米级垂直扫描系统,该系统采用粗/精两级驱动,粗驱动子系统由滑动导轨、直流无刷电机、精密丝杠组成,精驱动子系统由平行平板柔性铰链和压电陶瓷组成。对平行平板柔性铰链进行了力学分析,并推导计算了其固有频率。该垂直扫描系统的粗位移和精位移由同一套激光干涉位移计量系统计量。该垂直扫描系统运动范围为0～40mm,运动分辨率为5nm。
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| 关 键 词： | 垂直扫描系统 粗/精两级驱动 柔性铰链 激光干涉位移计量 |
Study on a Vertical Scanning System with Large-stroke and Nanopositioning Resolution |
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| Wang Shuzhen, Wang Shenghuai Xie Tiebang .Huazhong University of Science , Technology,Wuhan, .Luoyang Institute of Science , Technology,Luoyang,Henan.Study on a Vertical Scanning System with Large-stroke and Nanopositioning Resolution[J].China Mechanical Engineering,2010(4). |
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| Authors: | Wang Shuzhen Wang Shenghuai Xie Tiebang Huazhong University of Science Technology Wuhan Luoyang Institute of Science Technology Luoyang Henan |
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| Affiliation: | Wang Shuzhen1,2 Wang Shenghuai1 Xie Tiebang1 1.Huazhong University of Science , Technology,Wuhan,430074 2.Luoyang Institute of Science , Technology,Luoyang,Henan,471023 |
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| Abstract: | The purpose of this study is to develop a vertical scanning system with large-stroke and nanopositioning resolution,in which the coarse positioning was performed by sliding rail,brushless DC motor and precision lead screw,and the fine positioning was performed by parallel board flexure hinge and piezoelectric ceramic.The mechanics analysis and the natural frequency of the parallel board flexure hinge were carried out.The displacements of the coarse actuator and the fine actuator were measured by the same la... |
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| Keywords: | vertical scanning system coarse/fine dual-stage actuator flexure hinge laser interference displacement measuring |
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