振动轮式微机械陀螺仪中滑膜阻尼机理的研究

对空气阻尼进行定性和定量分析是MEMS器件设计中非常重要的一个步骤，直接影响MEMS器件的动态性能。研究了第三个区域中振动轮式微机械陀螺仪的滑膜阻尼，提出了滑膜阻尼模型，分析了滑膜阻尼的动态性能，包括速度分布、阻尼机制以及由此产生的能量损耗。根据滑膜阻尼分析结果，给出了品质因数的计算公式。试验表明，空气条件下振动轮式微机械陀螺仪品质因数的测试结果与理论值的误差约为16%。研究结果为振动轮式微机械陀螺仪结构设计中定量分析空气阻尼提供了理论依据。

Research on Slide Film Damping Mechanisms in Micromachined Vibrating Wheel Gyroscope

As air damping directly determines the dynamic performance of MEMS, it is very important to estimate the air damping effects on them in the design process. We researched the slide film damping mechanism in micromachined vibrating wheel gyroscope in the third pressure region. A physical model had been proposed for the characterization of slide film damping. Dynamic characteristics of a fluid film had been described, in terms of velocity profiles, damping mechanism, and viscous energy dissipation. The analytical damping formulae had been developed for practical Q estimation. Experimental study shows that the discrepancy between the theoretical Q and the experimental Q is about 16%, so that the analytical results can be used in the damping design for micromachined vibrating wheel gyroscopes.