| ZnO:Al(AZO)薄膜制备工艺参数的正交优化设计 |
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| 引用本文： | 葛春桥,薛亦渝,郭爱云,胡小锋,唐超.ZnO:Al(AZO)薄膜制备工艺参数的正交优化设计[J].武汉理工大学学报(信息与管理工程版),2004,26(5):210-212. |
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| 作者姓名： | 葛春桥 薛亦渝 郭爱云 胡小锋 唐超 |
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| 作者单位： | 武汉理工大学,材料科学与工程学院,湖北,武汉,430070 |
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| 摘 要： | 采用正交设计法,对溶胶-凝胶方法制备AZO薄膜的工艺参数进行了优化研究;确定了最佳工艺参数,为制备AZO薄膜的工业化控制提供了一种可行的方法。
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| 关 键 词： | AZO薄膜 溶胶-凝胶 正交设计 |
| 文章编号： | 1007-144X(2004)05-0210-03 |
| 修稿时间： | 2004年5月24日 |
Orthogonal Optimum Design of the Technological Parameters for the Preparation of AZO Thin Films |
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| Ge Chunqiao,Xue Yiyu,Guo Aiyun,Hu Xiaofeng,Tang Chao Postgraduate,School of Materials Science and Engineering,WUT,Wuhan ,China.Orthogonal Optimum Design of the Technological Parameters for the Preparation of AZO Thin Films[J].Journal of Wuhan University of Technology(Information & Management Engineering),2004,26(5):210-212. |
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| Authors: | Ge Chunqiao Xue Yiyu Guo Aiyun Hu Xiaofeng Tang Chao Postgraduate School of Materials Science and Engineering WUT Wuhan China |
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| Affiliation: | Ge Chunqiao,Xue Yiyu,Guo Aiyun,Hu Xiaofeng,Tang Chao Postgraduate,School of Materials Science and Engineering,WUT,Wuhan 43 0 0 70,China |
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| Abstract: | An optimum study of technological parameters for the preparation of AZO thin films by sol-gel is carried out through orthogonal design. Optimum technological parameters are determined, which provide a practicable approach for industrial control of the preparation of AZO thin films. |
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| Keywords: | AZO thin films sol-gel orthogonal design |
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