| Photoluminescence Characterization of Boron-doped Si Layers Grown by Molecular Beam Epitaxy |
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| 作者姓名： | LI Cheng LAI Hong-kai CHEN Song-yan |
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| 作者单位： | Research Center for Semieond. Photon. , Dept. of Phys., Xiamen University, Xiamen 361005, CHN |
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| 基金项目： | Fujian Creative Projects for Young Scientific Researchers（2004J021）. |
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| 摘 要： | Photoluminescence spectra were used to characterize the boron-doped Si layers grown by molecular beam epitaxy using HBO2 as the doping source. The influence of boron doping concentration on the dislocation-related photoluminescence spectra of molecular beam epitaxy Si layers annealed at 900 ℃ was studied with different doping concentrations and growth temperature. The broad photoluminescence band（from 0.75 eV to 0. 90 eV） including D1 and D2 bands was associated with high boron doping concentration in the samples, while D3 and D4 bands might be related to oxygen precipitates.
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| 关 键 词： | 光致发光 分子束 取向附生 光谱学 硅元素层 掺杂 |
| 文章编号： | 1007-0206（2005）04-0225-03 |
| 收稿时间： | 2005-06-14 |
| 修稿时间： | 2005-07-04 |
Photoluminescence Characterization of Boron-doped Si Layers Grown by Molecular Beam Epitaxy |
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| LI Cheng LAI Hong-kai CHEN Song-yan.Photoluminescence Characterization of Boron-doped Si Layers Grown by Molecular Beam Epitaxy[J].Semiconductor Photonics and Technology,2005,11(4):225-227. |
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| Authors: | LI Cheng LAI Hong-kai CHEN Song-yan |
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| Abstract: | Photoluminescence spectra were used to characterize the boron-doped Si layers grown by molecular beam epitaxy using HBO2 as the doping source. The influence of boron doping concentration on the dislocation-related photoluminescence spectra of molecular beam epitaxy Si layers annealed at 900 ℃ was studied with different doping concentrations and growth temperature. The broad photoluminescence band(from 0.75 eV to 0.90 eV) including D1 and D2 bands was associated with high boron doping concentration in the samples, while D3 and D4 bands might be related to oxygen precipitates. |
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| Keywords: | Photoluminescence Boron-doped silicon layer Dislocations |
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