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| 超精密气浮定位平台动力学特性分析 | |
| 引用本文： | 宛敏红,李冶夫,张杰. 超精密气浮定位平台动力学特性分析[J]. 机械设计与制造, 2011, 0(1) |
| 作者姓名： | 宛敏红 李冶夫 张杰 |
| 作者单位： | 中国科学院宁波材料技术与工程研究所浙江省磁性材料及其应用技术重点实验室,宁波,315201 |
| 基金项目： | 浙江省国际合作重大专项(2008C14046) |
| 摘 要： | 设计了一种超精密气浮定位平台,并运用Ansys对导轨和滑台分别作了有限元模态分析,校核了其动态刚度。在此基础上,分析了导轨的厚度对导轨刚度的影响以及滑台顶板厚度对滑台刚度的影响,为结构的优化设计提供了参考依据。分析结果显示,定位平台的刚度满足设计要求。 |
| 关 键 词： | 气浮定位平台 有限元分析 模态分析 超精密 |
Analysis of dynamic characteristics of a gas bearing positioning stage |
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| WAN Min-hong,LI Ye-fu,ZHANG Jie. Analysis of dynamic characteristics of a gas bearing positioning stage[J]. Machinery Design & Manufacture, 2011, 0(1) | |
| Authors: | WAN Min-hong LI Ye-fu ZHANG Jie |
| Affiliation: | WAN Min-hong,LI Ye-fu,ZHANG Jie(Zhejiang Province Key Laboratory of Magnetic Materials and Application Technology,Ningbo Institute of Materials Technology&Engineering,Chinese Academy of Sciences,Ningbo 315201,China) |
| Abstract: | A kind of ultra-precision gas bearing positioning stage is designed,and then the modal analysis for the guider and the sliding stage is carried out by use of Ansys to check the dynamic stiffness.Based on this,the influence of the guider thickness on its stiffness and the influence of the top plate thickness of the sliding stage on its stiffness are studied,and the influence study can provide references for the structure optimal design.The study results show that the stiffness of the positioning stage meet t... |
| Keywords: | Gas bearing positioning stage Finite element analysis Modal analysis Ultra-precision |
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