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Intercomparison of scanning probe microscopes |
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| Authors: | R Breil T Fries J Garnaes J Haycocks D Hüser J Joergensen W Kautek L Koenders N Kofod K R Koops R Korntner B Lindner W Mirand A Neubauer J Peltonen G B Picotto M Pisani H Rothe M Sahre M Stedman G Wilkening |
| Affiliation: | R. Breil, T. Fries, J. Garnaes, J. Haycocks, D. Hüser, J. Joergensen, W. Kautek, L. Koenders, N. Kofod, K. R. Koops, R. Korntner, B. Lindner, W. Mirandé, A. Neubauer, J. Peltonen, G. B. Picotto, M. Pisani, H. Rothe, M. Sahre, M. Stedman,G. Wilkening, |
| Abstract: | Comparison measurements on reference standards are reported in which 13 partners with different instruments took part. A set of prototype standards which had been produced and calibrated within a European project were used for the measurements. Here, results of measurements on a 240 nm step height standard and a two-dimensional lateral standard with a nominal pitch of 1 μm are reported. |
| Keywords: | Scanning probe microscopy Quantitative microscopy Calibration Comparison measurements Calibration artifacts |
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