硅压阻压力芯体恒压激励输出特性与温度补偿研究

为从理论上分析温度对硅压阻压力芯体输出特性的影响及串并联NTC热敏电阻的温度补偿规律,建立含压力和温度变量的分析模型,对10 V恒压激励条件下的硅压阻式压力芯体的输出特性进行了理论研究,并对军用级和民用级压力芯体的温漂系数进行比较分析.最后通过实测电阻温度系数,建立补偿电阻模块等效B值,进行理论计算和数值模拟结果比较分析,方法有效、结果可行,并提高了调试效率,为恒压激励下的温度补偿提供了理论依据.

Research on Output Characteristics and Temperature Compensation of Silicon Piezoresistive Pressure Sensor Driven by Constant Voltage Source

In order to theoretically study the effect of temperature on output characteristics of silicon piezoresistive pressure sensor and the compensation rule of Wheatstone bridge in series and parallel model with NTC thermistor circuit,the analytical model with pressure and temperature variables is established.Output characteristics of silicon piezoresistive pressure sensor under 10 V constant pressure excition are researched theoretically and the temperature coefficients of military and civil pressure sensors are compared and analyzed.Result proves it is feasible and effective after comparison and analysis of theoretical calculation and numerical simulation through the measurement of temperature coefficient of resistance and the derivation of equivalent B value,which provides the theoretical reference for actual temperature compensation under constant pressure excitation.