无声放电等离子体的光谱诊断

无声放电是一种非平衡态的、非稳定的和不均匀的放电 ,它被称作等离子体也是从时间平均的角度来考虑的。对这种非稳定的等离子体一直缺少一种有效的诊断手段。通过理论分析和实验提出用探针 光谱诊断技术测量无声放电等离子体的电子温度。气体放电中的光发射谱线是与等离子体的电子温度有关的。在直流放电的条件下 ,电子温度可通过朗谬尔探针的方法获得。如果能在同一放电系统中比较无声放电与直流放电的光谱数据 ,而直流放电的电子温度已知 ,则可以从比较当中得出无声放电电子温度的信息。本文通过这一方法给出了一个实验无声放电系统的电子温度与气体压强的关系。

Photo-spectroscopic Diagnosis of Electron Temperature in Silent Discharge Plasma

Silent discharge is a kind of nonequilibrium,nonstationary and inhomogeneous discharge,which can be considered as plasma only in an average time.However,a diagnostic means remains to be developed for this kind of plasma.By means of theoretical analysis and exp eriments, this paper introduces a photo spectroscopic diagnostic method which can provides an electron temperature measurement.Because the photoemission spectrum in discharges is affected by the electron temperature,this information could be derived from the photo spectrum.In a DC discharge,the electron temperature can be evaluated by a Langmuir probe.The electron temperature of a silent discharge can then be extracted by comparing the intensities of the emission lines in the silent discharge with those in DC discharge,both measurement can be conducted in the same discharge tube,while for the later the electron temperature is known.By the method we obtained the relationship between the electron temperature and pressure in an experimental silent discharge system.