Microscale Patterning of Mesoscopic PZN-PT Single Crystal Films by Crystal ion Slicing and Laser-Induced Etching |
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| Authors: | Kee S. Moon M. Levy Yong K. Hong H. Bakhru S. Bakhru |
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| Affiliation: | a Department of ME-EM, Michigan Technological University, Houghton, Michigan 49931, USA.b Department of Physics, Michigan Technological University, Houghton, Michigan 49931, USA.c Physics Department, SUNY at Albany, Albany, New York 12222, USA.d Department of Biomedical Engineering, Columbia University, New York, New York 10027, USA. |
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| Abstract: | Advances in the fabrication of solid-solution single crystal relaxor ferroelectrics have made it possible to produce highly efficient piezoelectric crystals, and have attracted renewed interest in the use of these crystals for a new generation of piezoelectric transducers, actuators and sensors. Of particular interest is their incorporation into micro-electromechanical systems (MEMS). In this paper we report on the laser-induced wet chemical etching of lead zinc niobate-lead titanate (PZN-PT) in hydrochloric acid (HCl). Argon-ion laser radiation at power levels up to 4 W is focused to a spot diameter of about 15μm and results in the chemical etching of grooves at patterning speeds up to 5μm/sec. Crystal ion slicing, an ion-implant-based film separation technique, is used in combination with laser etching to form 5 to 10μm-thick patterned and freestanding films for incorporation into micro-electromechanical devices. |
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