| Cu基Al掺杂ZnO多层薄膜的生长及其性能 |
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| 引用本文： | 王钰萍,吕建国,叶志镇.Cu基Al掺杂ZnO多层薄膜的生长及其性能[J].材料科学与工程学报,2011(6):869-873,905. |
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| 作者姓名： | 王钰萍 吕建国 叶志镇 |
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| 作者单位： | 浙江大学硅材料国家重点实验室材料科学与工程学系 |
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| 基金项目： | 浙江省钱江人才资助项目(2009R10046);高等学校博士学科点专项科研基金资助项目(200803351004);教育部留学回国人员科研启动基金资助项目(2009-1001) |
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| 摘 要： | 本文采用直流磁控溅射技术在玻璃衬底上制备了AZO/Cu、Cu/AZO和AZO/Cu/AZO三种复合结构多层膜,研究了生长温度对多层膜特性的影响,发现AZO/Cu双层薄膜具有最优的光电性能,其最佳生长温度为100~150℃。文中进一步考察了生长温度对AZO/Cu双层薄膜结构性能和表面形貌的影响,结果表明：合适的生长温度有...
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| 关 键 词： | AZO 多层结构薄膜 光电性能 生长温度 |
Growth and Properties of Cu-based Al-doped ZnO Multilayer Films |
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| WANG Yu-ping,LU Jian-guo,YE Zhi-zhen.Growth and Properties of Cu-based Al-doped ZnO Multilayer Films[J].Journal of Materials Science and Engineering,2011(6):869-873,905. |
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| Authors: | WANG Yu-ping LU Jian-guo YE Zhi-zhen |
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| Affiliation: | (State Key Laboratory of Silicon Materials,Department of Materials Science and Engineering,Zhejiang University,Hangzhou 310027,China) |
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| Abstract: | Al-doped ZnO/Cu(AZO/Cu) bi-layer,Cu/AZO bi-layer,and AZO/Cu/AZO tri-layer films were prepared on glass substrates by DC magnetron sputtering at different temperatures.Comparative study of electrical and optical properties reveal that AZO/Cu bi-layer film is superior in photoelectric properties to other two kinds of multilayer films,with an optimum growth temperature in the 100-150℃ range.Effects of growth temperature on the structural property and surface morphology of AZO/Cu bi-layer films were further investigated.Moderate growth temperatures could lead to high crystal quality of the films,and therefore improve the photoelectric properties.AZO/Cu bi-layer films grown at 150℃ have the highest figure of merit of 1.11×10-2 Ω-1,with a low sheet resistance of 8.99 Ω/sq,high visible transmittance of 80%,and near infrared reflectance of about 70%.Combination of good transparent-conductive property,excellent near-infrared reflectivity,and low-temperature deposition enable the AZO/Cu bi-layer films to be widely used in various fields such as coated glasses,solar cells,and flat panel displays. |
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| Keywords: | Al-doped ZnO(AZO) multiplayer films photoelectric properties growth temperature |
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