| MEMS应变式结冰传感器设计与制作 |
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| 引用本文： | 李宗兴,陈德勇,王军波.MEMS应变式结冰传感器设计与制作[J].传感技术学报,2011,24(8):1108-1113. |
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| 作者姓名： | 李宗兴 陈德勇 王军波 |
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| 作者单位： | 中国科学院电子学研究所,传感技术国家重点实验室,北京100190 |
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| 基金项目： | 中国科学院知识创新工程重要方向项目 |
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| 摘 要： | 提出了一种MEMS应变式结冰传感器.传感器基于结冰造成薄膜刚度改变的原理,采用惠斯通电桥结构检测结冰薄膜上应变电阻的变化,感知结冰信号.传感器利用惠斯通电桥自身结构及外加温度补偿电路,可有效地抑制输出信号的温漂.通过理论分析和有限元仿真,分析了器件的敏感机理,并对结构参数进行计算.采用与IC工艺兼容的体硅MEMS工艺完...
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| 关 键 词： | 结冰传感器 微传感器 箔式应变片 温度补偿电路 电桥恒流驱动 |
Design and Fabrication of MEMS Strain Gauge Icing Sensors |
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| LI Zongxing,CHEN Deyong,WANG Junbo.Design and Fabrication of MEMS Strain Gauge Icing Sensors[J].Journal of Transduction Technology,2011,24(8):1108-1113. |
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| Authors: | LI Zongxing CHEN Deyong WANG Junbo |
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| Abstract: | A MEMS strain gauge icing sensor is proposed. On the basis of icing on diaphragm causing its stiffness variation, Wheatstone bridge is adopted to detect the variation of strain gauge on the diaphragm to get icing information. Utilization of Wheatstone bridge and temperature compensation circuit greatly reduces the temperature drift of output signal. Through theoretical analysis and finite element simulation, the detecting principle of the sensor is described and its structural parameters are optimized. The sensor is fabricated by bulk MEMS processing technology, which is compatible whit IC fabrication. It is concluded that the icing detecting sensitivity of the sensor is less than 0.1mm through a series of icing detection experiments. |
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| Keywords: | icing sensor strain sensor MEMS fabrication process temperature compensation constant current driving of bridge |
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