Optical constants in the ultraviolet region of evaporated high index thin films

A suitable method to determine the optical constants of high index thin films is essential for developing high efficiency dielectric thin film devices in theuv region from 240 nm to 400 nm. A quick and accurate method is established to determine these constants. Using this method the optical losses, refractive index, absorption coefficient and extinction coefficient of ZrO₂ films prepared by the method of reactive evaporation were evaluated in theuv region.