Determination of Stress Tensors in thin textured copper films by grazing incidence diffraction

Ion-platted thin copper films were examined for residual stresses and texture by X-ray diffraction. The complete orientation distribution functions were determined and sharp (111)-fibre textures were found. The strains were measured by grazing incidence diffraction. The stress tensors were calculated using both texture-weighted elastic compliances and texture-independent X-ray elastic constants. The importance of the texture measurement for the stress tensor determination is discussed. The found stresses can be interpreted as thermally induced.