| 桥区参数对Ni-Cr薄膜换能元发火性能的影响 |
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| 引用本文： | 解瑞珍,薛艳,任小明,刘兰,卢斌,姚小宁. 桥区参数对Ni-Cr薄膜换能元发火性能的影响[J]. 火工品, 2012, 0(1): 18-20 |
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| 作者姓名： | 解瑞珍 薛艳 任小明 刘兰 卢斌 姚小宁 |
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| 作者单位： | 陕西应用物理化学研究所应用物理化学国家级重点实验室,陕西西安,710061 |
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| 摘 要： | 依据GJB/z 377A-94感度试验川兰利法,对设计制作的不同桥区参数的Ni-Cr薄膜换能元进行了发火感度测试.结果显示:当桥区尺寸、形状一定时,随着桥膜厚度的增加,换能元的发火电压减小,当桥膜的厚度增加到0.9μm,换能元发火电压又有增加的趋势；当桥膜厚度、桥区形状一定时,随着桥区宽度减小,发火电压降低,但当桥区宽度小于0.10mm时,发火电压反而上升；当桥膜厚度、桥区宽度一定时,桥区长度越长,发火电压越高,而且不同桥区形状对换能元发火感度有明显的影响.
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| 关 键 词： | Ni-Cr薄膜 桥区参数 磁控溅射 发火感度 |
Effect of Bridge Parameters on the Firing Sensitivity of Ni-Cr Alloy Thin Film Transducer Elements |
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| XIE Rui-zhen , XUE Yan , REN Xiao-ming , LIU Lan , LU Bin , YAO Xiao-ning. Effect of Bridge Parameters on the Firing Sensitivity of Ni-Cr Alloy Thin Film Transducer Elements[J]. Initiators & Pyrotechnics, 2012, 0(1): 18-20 |
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| Authors: | XIE Rui-zhen XUE Yan REN Xiao-ming LIU Lan LU Bin YAO Xiao-ning |
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| Affiliation: | (National Key Laboratory of Applied Physics and Chemistry,Shaanxi Applied Physics and Chemistry Research Institute,Xi’an,710061) |
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| Abstract: | The Ni-Cr alloy thin film transducer elements with different bridge parameters were designed and fabricated.The firing sensitivity was tested according to Langlie method.The results showd that the firing voltage of transducer elements decreased as the bridge film thickness increased,while the firing voltage increased when the bridge film thickness increased to 0.9μm.The firing voltage decreased as bridge length and bridge width decreased,but when the bridge width was smaller than 0.10mm,the firing voltage increased.At the same time,it showed that different bridge shape had obvious influence on the firing voltage. |
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| Keywords: | Ni-Cr thin film Bridge parameters Magnetron sputtering Firing sensitivity |
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