Microstructure and electrical properties of Pb(Zr0.52Ti0.48)O3 ferroelectric films on different bottom electrodes |
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| Affiliation: | 1. Department of Economics and Management, University of Trento, via Inama 5 – 38122 Trento, Italy;2. LIME, Imt School for Advanced Studies, Piazza S. Francesco 19 – 55100 Lucca, Italy;3. Department of Managerial Economics, Strategy and Innovation, KU Leuven, Naamsestraat 69 – 3000 Leuven, Belgium;4. Scuola Normale Superiore, Piazza dei Cavalieri, 7 – 56126 Pisa, Italy |
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| Abstract: | The crystalline quality, dielectric and ferroelectricity of the Pb(Zr0.52Ti0.48)O3 (PZT) films deposited on the LaNiO3 (LNO), LNO/Pt and Pt bottom electrodes were comparatively analyzed to investigate the possibility for their application. LNO thin films were successfully prepared on Si (100) and Pt(111)/Ti/SiO2/Si substrates by modified metallorganic decomposition (MOD). The PZT thin films were spin-coated onto the LNO, LNO/Pt and Pt bottom electrodes by sol–gel method. The crystallographic orientation and the microstructure of the resulting LNO films and PZT thin films on the different bottom electrodes were characterized by X-ray diffraction analysis. The dielectric and ferroelectric properties of PZT films on the different bottom electrodes are discussed. The PZT films deposited onto Pt/Ti/SiO2/Si and LNO/Si substrates show strong (110) and (100) preferred orientation, respectively, while the films deposited onto LNO/Pt/Ti/SiO2/Si substrates show the peaks of mixed orientations. PZT films on LNO and LNO/Pt bottom electrodes have larger dielectric constant and remnant polarizations compared with those grown on the Pt electrode. |
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