首页 | 本学科首页   官方微博 | 高级检索  
     


Influence of growth temperatures on the quality of InGaAs/GaAs quantum well structure grown on Ge substrate by molecular beam epitaxy
Authors:He Jifang  Shang Xiangjun  Li Mifeng  Zhu Yan  Chang Xiuying  Ni Haiqiao  Xu Yingqiang  Niu Zhichuan
Affiliation:State Key Laboratory for Superlattices and Microstructures, Institute of Semiconductors, Chinese Academy of Sciences, Beijing 100083, China
Abstract:Molecular beam epitaxy growth of an In_xGa_(1-x)As/GaAs quantum well(QW) structure(x equals to 0.17 or 0.3) on offcut(100) Ge substrate has been investigated.The samples were characterized by atomic force microscopy,photoluminescence(PL),and high resolution transmission electron microscopy.High temperature annealing of the Ge substrate is necessary to grow GaAs buffer layer without anti-phase domains.During the subsequent growth of the GaAs buffer layer and an In_xGa_(1-x)As/GaAs QW structure,temperature pl...
Keywords:Ge substrate  InGaAs/GaAs quantum well  molecular beam epitaxy  
本文献已被 CNKI 万方数据 等数据库收录!
点击此处可从《半导体学报》浏览原始摘要信息
点击此处可从《半导体学报》下载全文
设为首页 | 免责声明 | 关于勤云 | 加入收藏

Copyright©北京勤云科技发展有限公司  京ICP备09084417号