| 一种低噪声高线性度的微机械陀螺集成接口电路设计 |
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| 引用本文： | 方然,鲁文高,王冠男,陶婷婷,张雅聪,陈中建,于敦山.一种低噪声高线性度的微机械陀螺集成接口电路设计[J].半导体学报,2013,34(12):125009-6. |
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| 作者姓名： | 方然 鲁文高 王冠男 陶婷婷 张雅聪 陈中建 于敦山 |
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| 基金项目： | Project supported by the Special Fund for Agro-Scientific Research in the Public Interest （No. 200903021）. |
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| 摘 要： | This paper presents a continuous-time analog interface ASIC for use in MEMS gyroscopes. A charge sensitive amplifier with a chopper stabilization method is adopted to suppress the low-frequency noise. In order to cancel the effect caused by the gyroscope capacitive mismatch, a mismatch auto-compensation circuit is imple- mented. The gain and phase shift of the drive closed loop is controlled separately by an auto gain controller and an adjustable phase shifter. The chip is fabricated in a 0.35 μm CMOS process. The test of the chip is performed with a vibratory gyroscope, and the measurement shows that the noise floor is 0.003°/s√Hz, and the measured drift stability is 43°/h. Within -300 to 300°/s of rotation rate input range, the non-linearity is less than 0.1%.
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| 关 键 词： | 振动陀螺仪 MEMS ASIC 模拟接口 高线性度 低噪声 电荷灵敏放大器 CMOS工艺 |
A low-noise high-linearity interface ASIC for MEMS gyroscopes |
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| Fang Ran,Lu Wengao,Wang Guannan,Tao Tingting,Zhang Yacong,Chen Zhongjian and Yu Dunshan.A low-noise high-linearity interface ASIC for MEMS gyroscopes[J].Chinese Journal of Semiconductors,2013,34(12):125009-6. |
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| Authors: | Fang Ran Lu Wengao Wang Guannan Tao Tingting Zhang Yacong Chen Zhongjian and Yu Dunshan |
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| Affiliation: | National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China;National Key Laboratory of Science and Technology on Micro/Nano Fabrication, Peking University, Beijing 100871, China |
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| Abstract: | capacitive interface circuit MEMS gyroscope low noise ASIC |
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| Keywords: | capacitive interface circuit|MEMS gyroscope|low noise|ASIC |
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