| Wet Oxidation of AlxGa1－xAs/GaAs Distributed Bragg Reflectors |
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| 作者姓名： | Li Ruoyuan Wang Zhanguo Xu Bo Jin Peng Zhang Chunling Guo Xi and Chen Min |
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| 作者单位： | 中国科学院半导体研究所材料科学重点实验室 北京100083
(李若园，王占国，徐波，金鹏，张春玲)，北京工业大学光电子技术实验室 北京100022
(郭霞)，北京工业大学光电子技术实验室 北京100022(陈敏) |
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| 基金项目： | 国家重点基础研究发展计划(973计划)
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国家自然科学基金
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国家高技术研究发展计划(863计划) |
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| 摘 要： | The wet oxidation of AlGaAs with high Al content in a distributed Bragg reflectors (DBR) is studied by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).Some voids distribute along the oxide/GaAs interfaces due to the stress induced by the wet oxidation of the AlGaAs layers.These voids decrease the shrinkage of the Al2O3 layers to 8% instead of the theoretical 20% when compared to the unoxidized AlGaAs layers.With the extension of oxidation time,the reactants are more completely transported to the front interface and the products are more completely transported out along the porous interfaces.As a result,the oxide quality is better.
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| 关 键 词： | wet oxidation vertical cavity surface emitting laser distributed Bragg reflectors Al2O3 interface |
| 文章编号： | 0253-4177（2005）08-1519-05 |
| 收稿时间： | 2004-10-25 |
| 修稿时间： | 2005-03-14 |
Wet Oxidation of AlxGa1-xAs/GaAs Distributed Bragg Reflectors |
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| Li Ruoyuan,Wang Zhanguo,Xu Bo,Jin Peng,Zhang Chunling,Guo Xi,and Chen Min.Wet Oxidation of AlxGa1-xAs/GaAs Distributed Bragg Reflectors[J].Chinese Journal of Semiconductors,2005,26(8):1519-1523. |
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| Authors: | Li RuoYuan;Wang ZhanGuo;Xu Bo;Jin Peng;Zhang ChunLing;Guo Xia;Chen Min |
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| Abstract: | The wet oxidation of AlGaAs with high Al content in a distributed Bragg reflectors (DBR) is studied by scanning electron microscopy (SEM) and transmission electron microscopy (TEM).Some voids distribute along the oxide/GaAs interfaces due to the stress induced by the wet oxidation of the AlGaAs layers.These voids decrease the shrinkage of the Al_2O_3 layers to 8% instead of the theoretical 20% when compared to the unoxidized AlGaAs layers.With the extension of oxidation time,the reactants are more completely transported to the front interface and the products are more completely transported out along the porous interfaces.As a result,the oxide quality is better. |
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| Keywords: | wet oxidation vertical cavity surface emitting laser distributed Bragg reflectors Al_2O_3 interface |
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