一种基于MEMS工艺的二维风速传感器的设计

给出了一种基于MEMS工艺的二维热风速传感器的设计、制造以及测试结果.该传感器采用恒功率工作方式,利用热温差的方法测量风速和风向.本传感器采用MEMS剥离工艺在玻璃衬底上同时加工出加热电阻和测温电阻,利用简单可靠的加工工艺实现了热隔离和高灵敏度.经过风洞风速风向测试,得知传感器的风速量程超过10m/s,360°范围内风向测量误差不超过8°.传感器的响应时间不超过1s,功耗为10mW.

Design of a 2D Thermal Wind Sensor Based on MEMS Process

The design,fabrication,and test results of a 2D thermal wind sensor are presented.The wind sensor measures wind speed and direction by calorimetric principle in constant power mode.Heater and detector resistors are fabricated on glass substrate using a lift-off process.The fabrication is simple and reliable,and good thermal isolation and high sensitivity are achieved.The sensor can detect wind speed in the range of 10m/s and flow direction over 360° with an error of less than 8°.The response time of the sensor is less than 1s,and the heat power is 10mW.