| 用于单片集成的InP阵列波导光栅设计和制备 |
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| 引用本文： | 潘盼,安俊明,王亮亮,吴远大,王玥,胡雄伟. 用于单片集成的InP阵列波导光栅设计和制备[J]. 半导体学报, 2012, 33(7): 074010-4 |
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| 作者姓名： | 潘盼 安俊明 王亮亮 吴远大 王玥 胡雄伟 |
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| 作者单位： | 中国科学院半导体研究所集成光电子国家重点实验室,中国科学院半导体研究所集成光电子国家重点实验室,中国科学院半导体研究所集成光电子国家重点实验室,中国科学院半导体研究所集成光电子国家重点实验室 |
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| 基金项目： | Project supported by the National High Technology Research and Development Program of China （No. 2011AA010303） and the National Natural Science Foundation of China （Nos. 61090390, 60837001, 60877014, 60776057）. |
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| 摘 要： | InP 阵列波导光栅(AWG)是InP 基单片多波长转换器中的重要单元。采用深脊型波导结构,设计了一种10通道、通道间隔200GHZ(1.6nm)的偏振无关型InP基阵列波导光栅。采用外延技术、光刻、感应耦合等离子体刻蚀技术等在实验室制造出了这种AWG。经过测试,插入损耗约为-8dB,串扰小于-17dB,中心通道和旁边通道的通道均匀性基本上在3dB左右。
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| 关 键 词： | 阵列波导光栅 InP 设计 制造 太平洋 分子束外延生长 岛国 单片 |
| 收稿时间： | 2012-01-17 |
| 修稿时间： | 2012-02-14 |
Design and fabrication of an InP arrayed waveguide grating for monolithic PICs |
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| Pan Pan,An Junming,Wang Liangliang,Wu Yuand,Wang Yue and Hu Xiongwei. Design and fabrication of an InP arrayed waveguide grating for monolithic PICs[J]. Chinese Journal of Semiconductors, 2012, 33(7): 074010-4 |
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| Authors: | Pan Pan An Junming Wang Liangliang Wu Yuand Wang Yue Hu Xiongwei |
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| Affiliation: | State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,State Key Laboratory on Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences |
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| Abstract: | InP arrayed waveguide grating (AWG) is a key unit in InP based monolithic multi-wavelength transmitter. A 10-channel, 200GHz channel spacing InP AWG was designed, and the deep ridge waveguide design makes it polarization independent. Under the technologies of molecular beam epitaxy, lithography, and induced coupler plasma etching, the chip was fabricated in our laboratory. The tested results show that the insertion loss is about -8dB, and the crosstalk is less than -17dB. |
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| Keywords: | InP AWG monolithic PICs polarization independence |
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