Distributed feedback quantum cascade lasers operating in continuous-wave mode at λ≈7.6μm |
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作者姓名: | 张锦川 王利军 刘万峰 刘峰奇 赵立华 翟慎强 刘俊岐 王占国 |
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作者单位: | Key Laboratory of Semiconductor Materials Science,Institute of Semiconductors,Chinese Academy of Sciences;Department of Electronic Engineering,Tsinghua University |
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基金项目: | the National Science Fund for Distinguished Young Scholars of China,the National Natural Science Foundation of China,the National High Technology Research and Development Program of China |
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摘 要: | 正Distributed feedback(DFB) quantum cascade lasers(QCLs) in continuous-wave(CW) mode emitting atλ≈7.6μm are presented.Holographic lithography was used to fabricate the first-order distributed feedback grating. For a high-reflectivity-coated QCL with 14.5-μm-wide and 3-mm-long cavity,CW output powers of 300 mW at 85 K and still 10 mW at 270 K are obtained.Single-mode emission with a side-mode suppression ratio(SMSR) of about 30 dB and a wide tuning range of ~300 nm in the temperature range from 85 to 280 K is observed.
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关 键 词: | quantum cascade laser distributed feedback holographic lithography |
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