| 半导体激光器电吸收调制器和双波导模斑转换器的单片集成 |
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| 引用本文： | 侯廉平,王圩,冯文,朱洪亮,周帆,王鲁峰,边静.半导体激光器电吸收调制器和双波导模斑转换器的单片集成[J].半导体学报,2005,26(6). |
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| 作者姓名： | 侯廉平 王圩 冯文 朱洪亮 周帆 王鲁峰 边静 |
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| 作者单位： | 中国科学院半导体研究所,光电子研究发展中心,北京,100083 |
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| 基金项目： | 国家自然科学基金，国家重点基础研究发展计划(973计划) |
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| 摘 要： | 报道了1.6μm的半导体激光器和电吸收调制器以及双波导模斑转换器的单片集成器件.该器件具有良好的单横模特性和准单纵模特性(边模抑制比达25.6dB),3dB调制带宽为15GHz,直流消光比为16.2dB,远场发散角为7.3°×18.0°,和单模光纤的耦合效率达3.0dB.
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| 关 键 词： | 半导体激光器 电吸收调制器 模斑转换器 光电子集成 光耦合 |
Monolithically Integrated Laser Diode and Electroabsorption Modulator with Dual-Waveguide Spot-Size Converter Output |
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| Hou Lianping,Wang Wei,Feng Wen,Zhu Hongliang,Zhou Fan,Wang Lufeng,Bian Jing.Monolithically Integrated Laser Diode and Electroabsorption Modulator with Dual-Waveguide Spot-Size Converter Output[J].Chinese Journal of Semiconductors,2005,26(6). |
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| Authors: | Hou Lianping Wang Wei Feng Wen Zhu Hongliang Zhou Fan Wang Lufeng Bian Jing |
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| Abstract: | A 1.60μm laser diode and electroabsorption modulator monolithically integrated with a novel dualwaveguide spot-size converter output for low-loss coupling to a cleaved single-mode optical fiber are demonstrated.The devices emit in a single transverse and quasi single longitudinal mode with an SMSR of 25.6dB. These devices exhibit a 3dB modulation bandwidth of 15. 0GHz, and modulator DC extinction ratios of 16.2dB. The output beam divergence angles of the spot-size converter in the horizontal and vertical directions are as small as 7. 3°× 18. 0°,respectively, resulting in a 3. 0dB coupling loss with a cleaved single-mode optical fiber. |
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| Keywords: | laser diode electroabsorption modulator spot-size converter integrated optoelectronics optical coupling |
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