|
|||||
|
|
SOl-based radial-contour-mode micromechanical disk resonator |
|
| Authors: | Jia Yingqian Zhao Zhengping Yang Yongjun Hu Xiaodong Li Qian |
| Affiliation: | 1. School of Information Engineering, Hebei University of Technology, Tianjin 300130, China;The 13th Research Institute China Electron cs Techno ogy Group Corporat on, Shijiazhuang 050051 China 2. School of Information Engineering, Hebei University of Technology, Tianjin 300130, China;China Electronics Technology Group Corporation, Beijing 100846, China 3. The 13th Research Institute China Electron cs Techno ogy Group Corporat on, Shijiazhuang 050051 China |
| Abstract: | This paper reports a radial-contour-mode micromechanical disk resonator for radio frequency applications.This disk resonator with a gold plated layer as the electrodes,was prepared on a silicon-on-insulator wafer,which is supported by an anchor on another silicon wafer through Au-Au thermo-compression bonding.The gap between the disk and the surrounding gold electrodes is 100 nm.The radius of the disk is 20 μm and the thickness is 4.5μm.In results,the resonator shows a resonant frequency of 143 MHz and a quality factor of 5600 in vacuum. |
| Keywords: | RF-MEMS micromechanical disk resonator SOI thermo-compression bonding |
| 本文献已被 万方数据 等数据库收录！ | |
| 点击此处可从《半导体学报》浏览原始摘要信息 | |
| 点击此处可从《半导体学报》下载全文 | |