| 一种用于微机械惯性传感器中的16位ΣΔ调制器 |
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| 引用本文： | 徐宏林,付强,刘鸿娜,尹亮,王鹏飞,刘晓为.一种用于微机械惯性传感器中的16位ΣΔ调制器[J].半导体学报,2014,35(4):045007-6. |
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| 作者姓名： | 徐宏林 付强 刘鸿娜 尹亮 王鹏飞 刘晓为 |
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| 基金项目： | 国家自然科学基金项目（面上项目，重点项目，重大项目） |
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| 摘 要： | A fourth-order low-distortion low-pass sigma-delta （∑△） modulator is presented for micro-machined inertial sensors. The proposed single-loop single-bit feedback modulator is optimized with a feed-forward path to decrease the nonlinearities and power consumption. The IC is implemented in a standard 0.6 μm CMOS technology and operates at a sampling frequency of 3.846 MHz. The chip area is 2.12 mm^2 with 23 pads. The experimental results indicate a signal-to-noise ratio （SNR） of 100 dB and dynamic range （DR） of 103 dB at an oversampling rate （OSR） of 128 with the input signal amplitude of-3.88 dBFS at 9.8 kHz; the power consumption is 15 raW at a 5 V supply.
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| 关 键 词： | Σ-Δ调制器 惯性传感器 微机械 应用 CMOS技术 功率消耗 输入信号 采样频率 |
A 16-bit sigma-delta modulator applied in micro-machined inertial sensors |
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| Xu Honglin,Fu Qiang,Liu Hongn,Yin Liang,Wang Pengfei and Liu Xiaowei.A 16-bit sigma-delta modulator applied in micro-machined inertial sensors[J].Chinese Journal of Semiconductors,2014,35(4):045007-6. |
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| Authors: | Xu Honglin Fu Qiang Liu Hongn Yin Liang Wang Pengfei and Liu Xiaowei |
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| Affiliation: | MEMS Center, Harbin Institute of Technology, Harbin 150001, China;MEMS Center, Harbin Institute of Technology, Harbin 150001, China;MEMS Center, Harbin Institute of Technology, Harbin 150001, China;MEMS Center, Harbin Institute of Technology, Harbin 150001, China;MEMS Center, Harbin Institute of Technology, Harbin 150001, China;MEMS Center, Harbin Institute of Technology, Harbin 150001, China;Key Laboratory of Micro-Systems and Micro-Structures Manufacturing, Harbin 15001, China |
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| Abstract: | analog-to-digital converter low-distortion low-pass sigma delta modulator micro-machined inertialsensor |
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| Keywords: | analog-to-digital converter low-distortion low-pass sigma-delta modulator micro-machined inertial sensor |
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