| MEMS压阻式三轴加速度传感器的双路循环电桥检测法 |
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| 引用本文： | 张娟婷,何常德,张慧,李玉平,张永平,杜春晖,张文栋.MEMS压阻式三轴加速度传感器的双路循环电桥检测法[J].半导体学报,2014,35(6):064012-10. |
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| 作者姓名： | 张娟婷 何常德 张慧 李玉平 张永平 杜春晖 张文栋 |
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| 作者单位： | [1]Key Laboratory of Instrumentation Science ＆ Dynamic Measurement, Ministry of Education, North University of China,Taiyuan 030051, China [2]Key Laboratory of Science and Technology on Electronic Test ＆ Measurement, North University of China, Taiyuan 030051,China |
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| 基金项目： | 国际科技合作项目（No.61011140351）,国家自然科学基金项目（61127008） |
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| 摘 要： | A cycle bridge detection method, which uses a piezoresistive triaxial accelerometer, has been described innovatively. This method just uses eight resistors to form a cycle detection bridge, which can detect the signal of the three directions for real time. It breaks the law of the ordinary independent Wheatstone bridge detection method, which uses at least 12 resistors and each four resistors connected as a Wheatstone bridge to detect the output signal from a specific direction. In order to verify the feasibility of this method, the modeling and simulating of the sensor structure have been conducted by ANSYS, then the dual cycle bridge detection method and independent Wheatstone bridge detection method are compared, the result shows that the former method can improve the sensitivity of the sensor effectively. The sensitivity of the x, y-axis used in the former method is two times that of the sensor used in the latter method, and the sensitivity of the z-axis is four times. At the same time, it can also reduce the cross-axis coupling degree of the sensor used in the dual cycle bridge detection method. In addition, a signal amplifier circuit and adder circuit have been provided, Finally, the test result of the ＂eight-beams/mass＂ triaxial accelerometer, which is based on the dual cycle bridge detection method and the related circuits, have been provided. The results of the test and the theoretical analysis are consistent, on the whole.
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| 关 键 词： | 桥梁检测 加速度计 双循环 MEMS技术 压阻式 三轴 信号放大电路 传感器结构 |
The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology |
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| Zhang Juanting,He Changde,Zhang Hui,Li Yuping,Zhang Yongping,Du Chunhui and Zhang Wendong.The dual cycle bridge detection of piezoresistive triaxial accelerometer based on MEMS technology[J].Chinese Journal of Semiconductors,2014,35(6):064012-10. |
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| Authors: | Zhang Juanting He Changde Zhang Hui Li Yuping Zhang Yongping Du Chunhui and Zhang Wendong |
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| Affiliation: | Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement, Ministry of Education, North University of China, Taiyuan 030051, China;Key Laboratory of Science and Technology on Electronic Test & Measurement, North University of China, Taiyuan 030051, China |
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| Abstract: | A cycle bridge detection method, which uses a piezoresistive triaxial accelerometer, has been described innovatively. This method just uses eight resistors to form a cycle detection bridge, which can detect the signal of the three directions for real time. It breaks the law of the ordinary independent Wheatstone bridge detection method, which uses at least 12 resistors and each four resistors connected as a Wheatstone bridge to detect the output signal from a specific direction. In order to verify the feasibility of this method, the modeling and simulating of the sensor structure have been conducted by ANSYS, then the dual cycle bridge detection method and independent Wheatstone bridge detection method are compared, the result shows that the former method can improve the sensitivity of the sensor effectively. The sensitivity of the x, y-axis used in the former method is two times that of the sensor used in the latter method, and the sensitivity of the z-axis is four times. At the same time, it can also reduce the cross-axis coupling degree of the sensor used in the dual cycle bridge detection method. In addition, a signal amplifier circuit and adder circuit have been provided. Finally, the test result of the "eight-beams/mass" triaxial accelerometer, which is based on the dual cycle bridge detection method and the related circuits, have been provided. The results of the test and the theoretical analysis are consistent, on the whole. |
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| Keywords: | piezoresistive triaxial accelerometer cycle detection bridge MEMS |
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