| 一种新型压阻值理论计算方法 |
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| 引用本文： | 洪应平,梁庭,葛冰儿,王伟,郑庭丽,李赛男,熊继军.一种新型压阻值理论计算方法[J].半导体学报,2014,35(5):054009-4. |
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| 作者姓名： | 洪应平 梁庭 葛冰儿 王伟 郑庭丽 李赛男 熊继军 |
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| 作者单位： | Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China),Ministry of Education;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of ElectronicScience and technology, North University of China |
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| 基金项目： | 国家重点基础研究规划项目 |
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| 摘 要： | A novel algorithmic method, based on the different stress distribution on the surface of thin film in an SOI microstructure, is put forward to calculate the value of the silicon piezoresistance on the sensitive film. In the proposed method, we take the Ritz method as an initial theoretical model to calculate the rate of piezoresistance ΔR/R through an integral （the closed area Ω where the surface piezoresistance of the film lies as the integral area and the product of stress σ and piezoresistive coefficient π as the integral object） and compare the theoretical values with the experimental results. Compared with the traditional method, this novel calculation method is more accurate when applied to calculating the value of the silicon piezoresistance on the sensitive film of an SOI pieoresistive pressure sensor.
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| 关 键 词： | 硅压阻 计算 应力分布 Ritz法 压力传感器 压阻系数 SOI 微结构 |
A novel algorithmic method for piezoresistance calculation |
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| Hong Yingping,Liang Ting,Ge Binger,Wang Wei,Zheng Tingli,Li Sainan and Xiong Jijun.A novel algorithmic method for piezoresistance calculation[J].Chinese Journal of Semiconductors,2014,35(5):054009-4. |
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| Authors: | Hong Yingping Liang Ting Ge Binger Wang Wei Zheng Tingli Li Sainan and Xiong Jijun |
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| Affiliation: | Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China;Key Laboratory of Instrumentation Science & Dynamic Measurement (North University of China), Ministry of Education, Taiyuan 030051, China;Ministry of Education and Science Technology on Electronic Test & Measurement Laboratory, Department of Electronic Science and technology, North University of China, Taiyuan 030051, China |
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| Abstract: | piezoresistance integral piezoresistive pressure sensor accuracy |
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| Keywords: | piezoresistance integral piezoresistive pressure sensor accuracy |
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