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Effect of a high temperature AlN buffer layer grown by initially alternating supply of ammonia on AIGaN/GaN heterostuctures |
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| Authors: | Duan Huantao Hao Yue Zhang Jincheng |
| Affiliation: | Key Laboratory of Fundamental Science for National Defense on Wide Band-Gap Semiconductor Technology, School of Microelectronics, Xidian University, Xi'an 710071, China |
| Abstract: | metal-organic vaporphase epitaxy aluminum nitride gallium nitride AlGaN/GaN heterostructures |
| Keywords: | metal-organic vaporphase epitaxy aluminum nitride gallium nitride AlGaN/GaN heterostructures |
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