非均匀金属线宽和线间距射频螺旋电感品质因子的改善

为了提高品质因子Q，本文提出了一种非均匀金属条宽和非均匀条间距的改进电感结构。从外圈到里圈，改进的电感金属线宽按等差数列逐渐减小，金属间距按等比数列增加。因为该渐变结构有效减弱了线圈中心电流拥挤导致的涡流效应，所以改进结构电感的Q因子大幅度提高（幅值高达42.86%）。为了进一步增大Q因子，新型电感同时采用图形化接地保护结构（PGS）与渐变结构。结果显示，在0.5GHz到16GHz的射频频段内，结合两种技术的新型电感的品质因子Q最优，与固定金属线宽和间距的传统电感相比，Q提高了67%；与仅采纳PGS结构的电感相比，Q提高了23%；与仅采用渐变金属结构的电感相比，Q提高了20%。

Improving the quality factor of an RF spiral inductor with non-uniform metal width and non-uniform coil spacing

An improved inductor layout with non-uniform metal width and non-uniform spacing is proposed to increase the quality factor (Q factor). For this inductor layout, from outer coil to inner coil, the metal width is reduced by an arithmetic-progression step, while the metal spacing is increased by a geometric-progression step. An improved layout with variable width and changed spacing is of benefit to the Q factor of RF spiral inductor improvement (approximately 42.86%), mainly due to the suppression of eddy-current loss by weakening the current crowding effect in the center of the spiral inductor. In order to increase the Q factor further, for the novel inductor, a patterned ground shield is used with optimized layout together. The results indicate that, in the range of 0.5 to 16 GHz, the Q factor of the novel inductor is at an optimum, which improves by 67% more than conventional inductors with uniform geometry dimensions (equal width and equal spacing), is enhanced by nearly 23% more than a PGS inductor with uniform geometry dimensions, and improves by almost 20% more than an inductor with an improved layout.