| 一种新颖微机械数模转换器的模拟与设计优化 |
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| 引用本文： | 刘清惓,黄庆安.一种新颖微机械数模转换器的模拟与设计优化[J].半导体学报,2001,22(12). |
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| 作者姓名： | 刘清惓 黄庆安 |
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| 作者单位： | 东南大学微电子中心,南京,210096 |
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| 基金项目： | 国家自然科学基金，高等学校博士学科点专项科研项目 |
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| 摘 要： | 提出了一种基于权间隙原理的微机械数模转换器(WGDAC),它与电路中的权电阻数模转换器的原理类似,利用间隙的长度作为比例因子,从而实现由二进制电压输入到模拟位移输出的转换.给出了有限元方法分析对由热执行器阵列驱动的数模转换器的输出位移分析的结果.为了减小误差,对结构作了优化设计,使误差不大于0.002μm.
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| 关 键 词： | 数模转换器 微电子机械系统 微执行器 精确定位 有限元分析 |
Simulation and Design Optimization of Novel Microelectromechanical Digital-to-Analog Converter |
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| LIU Qing-quan,HUANG Qing-an.Simulation and Design Optimization of Novel Microelectromechanical Digital-to-Analog Converter[J].Chinese Journal of Semiconductors,2001,22(12). |
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| Authors: | LIU Qing-quan HUANG Qing-an |
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| Abstract: | A microelectromechanical Digital-to-Analog Converter (DAC) based on Weighted-Gap (WG) principle is
described,which is analogous to the weighed-resistor DAC in electronic circuits. To convert the input of binary
voltage to the output of analog displacement,the gaps are proposed to be employed as a scale factor. A finite ele
ment method is used to simulate the performance of the DAC. To reduce the error,the structure design is optimized
and the maximum error of 0. 002μm is obtained. |
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