| 无声放电等离子体及其应用 |
| |
| 引用本文： | 凌一鸣.无声放电等离子体及其应用[J].电子器件,1997,20(3):8-19. |
| |
| 作者姓名： | 凌一鸣 |
| |
| 作者单位： | 东南大学电子工程系 |
| |
| 摘 要： | 无声放电等离子体是一种非平衡态子体，它可用于等离子体化学、紫外与真空紫外光源以及气体激光器激励等方面。本文将概要介绍无放电及其应用的研究进展。
|
| 关 键 词： | 无声放电 低温等离子体 气体放电 |
Silent Discharge Plasma and Its Application |
| |
| Ling Yiming.Silent Discharge Plasma and Its Application[J].Journal of Electron Devices,1997,20(3):8-19. |
| |
| Authors: | Ling Yiming |
| |
| Abstract: | Silent discharge plsama is a kind of un equilibrium plasma, it can be used for a series of fields such as plasma chemistry, UV and UVU light source and excitation of gas lasers, etc. The advance on research of the silent discharge and its application will be introduced briefly in this paper. |
| |
| Keywords: | silent discharge low temperature plasma gas discharge |
| 本文献已被 CNKI 维普 等数据库收录！ |
