一种新型MEMS加速度传感器的研制

针对传统机械类传感器体积比较大、耗电量高、长期监测稳定性差的不足，研发出一种新颖的基于MEMS（微机械加工）技术的无线传感器。分析了加速度传感器的检测原理，设计了信号检测模块、微控制器模块及无线收发模块等硬件集成电路，并进行了软件实现。设计实验系统对所研发的加速度传感器动态特性进行了研究，实验结果表明：该传感器在不同的加速度输入输出反复实验中，具有良好的线性响应，线性拟合度在0.999%F.S以上，重复稳定性好，动态响应快，适用于结构的低频振动测试。

Research on a new type of MEMS acceleration Sensor

Since the traditional mechanical sensor has such disadvantages us large volume, high power consumption and poor long-term stability. A novel wireless sensor based on MEMS technology is developed. The measuring principle of this kind of wireless sensor is analyzed. The signal detection module, the micro-controller module and the wireless transceiver module of this kind of wireless sensor are respectively designed. The embedded control software of this wireless sensor is developed. One experiment system is designed to study the dynamic characteristic of this wireless sensor. The experimental results under different acceleration input excitation show that the sensor has good linear response, good repeatability and stability and its dynamic response is fast. This kind of wireless sensor is particularly suitable for measuring the low frequency vibration.