| 室温红外探测器研究与进展 |
| |
| 引用本文： | 刘兴明, 韩琳, 刘理天,.室温红外探测器研究与进展[J].电子器件,2005,28(2):415-420,431. |
| |
| 作者姓名： | 刘兴明 韩琳 刘理天 |
| |
| 作者单位： | 清华大学微电子学研究所,北京,100084 |
| |
| 摘 要： | 简要概述了室温红外探测器技术的最新研究现状，首先根据工作机理的不同对红外探测器进行了分类，详细阐述了室温红外探测器的优点所在；接着在给出了室温红外探测器典型结构的基础上，对这些典型结构进行了比较和讨论；给出了最近出现的几种新型探测器，介绍了其工作原理、制作工艺和主要性能指标；最后对室温红外探测器的发展方向进行了预测。
|
| 关 键 词： | 室温红外探测器 测辐射热计 热释电 标准CMOS工艺 薄膜晶体管 |
| 文章编号： | 1005-9490(2005)02-0415-06 |
Research and Development of Uncooled Infrared Detectors |
| |
| LIU Xing-ming,HAN Lin,LIU Li-tian.Research and Development of Uncooled Infrared Detectors[J].Journal of Electron Devices,2005,28(2):415-420,431. |
| |
| Authors: | LIU Xing-ming HAN Lin LIU Li-tian |
| |
| Affiliation: | Institute of Microelectronics; Tsinghua University; Beijing 100084; China |
| |
| Abstract: | The latest research status of uncooled infrared detectors is reviewed. The infrared detectors are classified according to the different operation principle, and the merit of uncooled infrared detectors is particularly described. The typical detector structures are presented, compared and discussed. This paper describes the primary structures, technology and elementary indicators of several new detectors, and the development orientation of uncooled infrared detectors is predicted. |
| |
| Keywords: | uncooled infrared detector bolometer pyroelectric standard CMOS process thin film transistor |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《电子器件》浏览原始摘要信息 |
|
点击此处可从《电子器件》下载全文 |
