| 洁净室气态分子污染物的监测技术 |
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| 引用本文： | 田世爱,于自强,赵树奎,迟宏伟.洁净室气态分子污染物的监测技术[J].洁净与空调技术,2006(2):12-17. |
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| 作者姓名： | 田世爱 于自强 赵树奎 迟宏伟 |
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| 作者单位： | 1. 烟台宝源净化有限公司
2. 烟台富仕通机械制造有限公司 |
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| 摘 要： | 随着微电子工业工序复杂性的增加和产品尺寸的不断缩小,气态分子污染物(AMC)对产品的影响成为洁净室环境控制中重点关注的问题。文章介绍了洁净室中AMC的定义,重点阐述了AMC的监测技术。
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| 关 键 词： | 洁净室 气态分子 污染物 监测 控制 |
| 收稿时间： | 2006-02-07 |
| 修稿时间： | 2006-02-17 |
Monitoring Airborne Molecular Contaminants in Cleanrooms |
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| TIAN Shiai,Yu Ziqiang,ZHAO Shukui,CHI Hongwei.Monitoring Airborne Molecular Contaminants in Cleanrooms[J].Contamination Control & Air-Conditioning Technology,2006(2):12-17. |
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| Authors: | TIAN Shiai Yu Ziqiang ZHAO Shukui CHI Hongwei |
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| Affiliation: | YANTAIR, China |
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| Abstract: | In semiconductor facilities, contamination control programs require the use of high efficiency particulate air (HEPA)filter and ultra low penetration air (ULPA) filter to control the particles. However, as device dimensions shrink, airborne molecular contaminants (AMC) that poses a threat to product performance and reliability will become the primary contamination in semiconductor cleanrooms. In this paper, the definiton and classification of AMC are discussed, the fundamental principle of measurement is also presented. |
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| Keywords: | Cleanroom Airborne Molecular Contaminants Monitoring Control |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
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