| 光纤共焦干涉显微成像系统轴向响应特性 |
| |
| 引用本文： | 邹丽敏,李溪,丁雪梅.光纤共焦干涉显微成像系统轴向响应特性[J].光电子．激光,2008,19(8). |
| |
| 作者姓名： | 邹丽敏 李溪 丁雪梅 |
| |
| 作者单位： | 哈尔滨工业大学超精密光电仪器工程研究所,黑龙江,哈尔滨,150080 |
| |
| 基金项目： | 国家自然科学基金资助项目 |
| |
| 摘 要： | 以光纤共焦干涉系统的三维传递函数和轴向响应特性为基础,分析和研究了光纤光斑尺寸、瞳半径,探测器尺寸、光纤与透镜的匹配等对该系统轴向分辨率的影响.实验表明,为使系统获得较高的轴向分辨率,需控制与光纤光斑尺寸有关的参数A 小于4,并使透镜的数值孔径小于光纤数值孔径;优化后系统轴向响应的半高宽仅为光纤共焦系统的1.1%.
|
| 关 键 词： | 光纤共焦干涉 系统参数 轴向分辨率 干涉条纹可见度 |
The axial-response property of optic-fiber confocal interference microscopy system |
| |
| ZOU Li-min,LI Xi,DING Xue-mei.The axial-response property of optic-fiber confocal interference microscopy system[J].Journal of Optoelectronics·laser,2008,19(8). |
| |
| Authors: | ZOU Li-min LI Xi DING Xue-mei |
| |
| Affiliation: | ZOU Li-min,LI Xi,DING Xue-mei(Institute of Ultra Precision Optical & Electronic Instrument Engineering,Harbin Institute of Technology,Harbin 150080,China) |
| |
| Abstract: | The axial-resolution is an important parameter of the optical-fiber confocal interference microscopy system(FOCSIM),which directly determined the measurement accuracy of the system.The Michelson interference principle was employed in the novel FOCSIM for the axial-resolution improvement.Based on the three-dimension transfer function and axial response property,the axial-resolution of FOCSIM is analyzed in this paper by the effect of fiber spot size,pupil radius,size of detector and matching of fiber and len... |
| |
| Keywords: | optic-fiber confocal interference microscopy system systematic parameter axial resolution |
| 本文献已被 CNKI 维普 万方数据 等数据库收录！ |
| 点击此处可从《光电子．激光》浏览原始摘要信息 |
|
点击此处可从《光电子．激光》下载全文 |
|
