Wollaston棱镜宽带减反射膜的研制及测试

针对Wollaston棱镜中o、e光对应的基底折射率相差较大以及制作该晶体的冰洲石和许多薄膜材料间附着力较差的特点，为了提高镀膜材料和冰洲石基底的附着力以及提高棱镜的透过比，拓宽有效使用带宽，借助于计算机辅助设计方法，设计了高性能多层减反射膜系。选用合适的光学薄膜材料，利用电子束蒸镀，借助于离子源辅助蒸镀，制作了高性能的宽带减反射膜。测试结果表明：o光的平均剩余反射率小于1．0％，e光的平均剩余反射率小于0．5％，有效使用带宽在近红外大于200nm；薄膜和基底结合牢固，达到了设计要求，提升了棱镜的品质。

Design and Test of Broad-band Antireflection Thin Films Based on Wollaston Prism

In order to improve the adhesive power of coating materials and Iceland crystal and increase the transmittance and bandwidth, we have designed a multiplayer structure broadband anti-reflecting coating. During the evaporating process ,we selected suitable optical film materials and used electron bundle to evaporate with ion source evaporating,so we obtained a broad and anti-reflecting film with high quality. The result of test indicates that the average reflection value is below 0.5 % and the effective bandwidth is the near infrared spectrum; the adhesive power of coating materials and Iceland crystal is firm and achieved the aim of design and improved the performance of Wollaston prism.