| 基于多分辨分析的集成元件管脚微位移检测 |
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| 引用本文： | 李鹏,方志良,等.基于多分辨分析的集成元件管脚微位移检测[J].光电子．激光,2001,12(11):1147-1151. |
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| 作者姓名： | 李鹏 方志良 |
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| 作者单位： | 南开大学现代光学研究所天津市光电子联合研究中心, |
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| 基金项目： | 天津市光电子联合研究中心资金资助项目 |
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| 摘 要： | 由于电子集成元件的管脚朝着多且细的方向发展，管脚偏移检测要求提高，一般的检测方法不能满足这样高的精度。本文研究了采用光电自动快速检测大尺寸、多管脚集成块管脚位置微偏移的方法，提出了基于多分辨分析（MRA）的微位移的检测技术，达到亚像素的检测精度，具有良好的可靠性，解决了大型集成块管脚位置偏差自动化检测问题。
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| 关 键 词： | 多分辨分析 微位移检测 集成电路 |
| 文章编号： | 1005-0086(2001)11-1147-05 |
| 修稿时间： | 2001年3月30日 |
Deviation Inspecting of DIP Chip Pin Micro-shift Based on Multi-Resolution Analysis |
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| LI Peng,FANG Zhi liang,LIU Fu lai,ZHAO Peng,MU Guo guang.Deviation Inspecting of DIP Chip Pin Micro-shift Based on Multi-Resolution Analysis[J].Journal of Optoelectronics·laser,2001,12(11):1147-1151. |
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| Authors: | LI Peng FANG Zhi liang LIU Fu lai ZHAO Peng MU Guo guang |
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| Abstract: | The inspection of chip pin location is a necessary step in chip aspect measurement.With the development of chip,there are more and more pins on each chip,and the width of each pin becomes narrower.It is impossible to deal with the measurement using the traditional methods.A measurement method for it based on multiple resolution analysis(MRA) calculation is proposed in this paper,that distinguish the micro shifts of the pins according to the coefficient of MRA.The method has the merit of fast speed,high precision and high reliability.The experiment result is given. |
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| Keywords: | IC chip aspect inspection multiple resolntion analysis(MRA) |
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