Li掺杂量对Li-N共掺ZnO薄膜光学性能的影响

本文利用溶胶-凝胶旋涂法在玻璃衬底上制备了 本征、N单掺和Li-N共掺的ZnO薄膜。 研究Li掺杂量的改变对薄膜的晶体结构、表面形貌、透过性能和发光性能的影响。采用了紫 外-可见分光光度计(UV-VIS)、光致发光谱(PL)、扫描电子显微镜(SEM)和X射线衍 射 仪(XRD)等表征手段对样品进行了测试。结果表明:Li掺杂量的改变对薄膜的结构和性能 都有一定的影响,随着Li掺杂量的增加,(002)衍射峰强度增大,晶 粒尺寸先增加后减小, 紫外发射峰的强度和薄膜的透过性能同样是先增强后减弱。当Li元素的原子比为6at%时, 薄膜的c轴择优取向明显,结晶性能最好,薄膜紫外发光最强,透过率最大。

Effect of Li doping on optical properties of Li-N Co-doped ZnO films

In this paper,the intrinsic,N-doped and Li-N co-doped ZnO thin film s were prepared on glass substrates by sol-gel spin-coating method.The effect s of the doping amount of Li on the crystal structure,surface morphology,transmi ttance of the films and luminescence were investigated.UV-Vis spectrophotomete r (UV-VIS),photoluminescence (PL),scanning electron microscope (SEM) and X-ray d iffr actometer (XRD) were used to characterize the samples.The results show that the structure and properties of the films are influenced by the doping amount of Li. With the increase of the doping amount of Li,the (002) diffraction peak intens ity increases,and the grain size increases first and then decreases.The intens ity of the UV emission peak and the transmittance of the film are enhanced first and then weakened.When the doping amount of Li is 6at%,the preferred orientat ion of the c axis of the thin film is the most obvious,the ultraviolet luminesc ence is the strongest and the transmittance is the largest.