直线导轨二维转角同时测量装置的研制

提出了一种同时测量直线导轨二维转角的简单方法。基于半导体激光器（LD）、单模光纤组件的激光基准，建立了直线导轨运动副二维转角相关测量模型。分析了俯仰角、偏摆角的误差分离和实时测量原理。通过稳定性、重复性和比对实验验证了所提系统的可靠性。实验结果表明，系统测角分辨率优于0．5″。

Development of Equipment for Simultaneously Measuring Two-dimensional Rotation Angles of the Linear Guide Track

A simple and novel method for simultaneously measuring two-dimensional rotation angles of the linear guide track was presented which is based on a single-mode fiber-coupled laser module.The measuring model was established by adopting laser collimation technique.The system includes a fixing part and a moving part.The measuring principle of yaw and pitch was analyzed.The error separation is realized in theory.The experiments of stability,repeatability and its comparison with the double-frequency laser interference measuring system have been carried out.The practical results of the experiments show a good consistence with theoretical analysis.The systemic resolutions of measuring angles are better than 0.5".