| 光敏杂化溶胶-凝胶法研制多模干涉波导分束器 |
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| 引用本文： | 吴远大.光敏杂化溶胶-凝胶法研制多模干涉波导分束器[J].光电子．激光,2010(10):1452-1454. |
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| 作者姓名： | 吴远大 |
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| 作者单位： | 中国科学院半导体研究所光电研发中心; |
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| 基金项目： | 国家自然科学基金资助项目(60707008,60977045); 国家“863”计划资助项目(2007AA03Z420) |
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| 摘 要： | 采用有机/无机杂化溶胶-凝胶方法制备高质量的SiO2薄膜和光敏性薄膜材料;利用三维FD-BPM(finitedifference beam propagation method)研究了掩埋式和暴露式矩形波导结构多模干涉(MMI)型光功率分束器的主要性能,理论模拟发现,掩埋式矩形波导结构分束器的长度、宽度和厚度容差性都优于暴露式矩形波导结构的MMI型分束器,并且具有更宽的带宽特性。通过简单的紫外曝光、显影工艺制备了1×4 MMI型波导分束器,分束器在1 550 nm波长附近的插入损耗为8.1～8.8 dB,功率分束不均匀性小于1 dB。
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| 关 键 词： | 杂化溶胶-凝胶 光敏 多模干涉(MMI) 分束器 |
Fabrication of MMI splitters by photosensitive hybrid sol-gel technology |
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| WU Yuan-da.Fabrication of MMI splitters by photosensitive hybrid sol-gel technology[J].Journal of Optoelectronics·laser,2010(10):1452-1454. |
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| Authors: | WU Yuan-da |
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| Affiliation: | WU Yuan-da,AN Jun-ming,WANG Yue,YIN Xiao-jie,ZHANG Jia-shun,LI Jian-guang,WANG Hong-jie,HU Xiong-wei (Research , Development Center for Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China) |
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| Abstract: | The perfect photosensitive SiO2 films with no cracks,small roughness and smooth surface are fabricated by the organic/inorganic hybrid sol-gel method.Then,the main performance of multi-mode interference(MMI) power splitters with the two kinds of UVlight imprinting structures,buried rectangular waveguide and exposed rectangular waveguide,is discussed using three-dimensional finite difference beam propagation method(FD-BPM).The simulated results show that the MMI optical power splitter with the buried structu... |
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| Keywords: | hybrid sol-gel photosensitive multi-mode interference(MMI) splitters |
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