| SoI基微环谐振可调谐滤波器 |
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| 引用本文： | 姜宏伟,吴远大. SoI基微环谐振可调谐滤波器[J]. 光电子．激光, 2011, 0(6): 813-815 |
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| 作者姓名： | 姜宏伟 吴远大 |
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| 作者单位： | 吉林体育学院现代教育技术中心； 中国科学院半导体研究所,集成光电子学国家重点联合实验室；;中国科学院半导体研究所,集成光电子学国家重点联合实验室； |
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| 基金项目： | 国家“863”计划资助项目(2007AA03Z420);国家自然科学基金资助项目(60977045) |
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| 摘 要： | 采用电子束光刻和ICP刻蚀等工艺制作出绝缘体上Si(SoI)基纳米线波导微环谐振(MRR)滤波器,波导截面尺寸为300 nm×320 nm,微环半径为5 μm.测试结果表明,器件的自由频谱宽度(FSR)为16.8nm,1.55μm波长附近的消光比(ER)为18.1 dB.通过对MRR滤波器进行热光调制,在21.4～60...
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| 关 键 词： | 绝缘体上Si(SoI) 纳米线波导 微环谐振(MRR) 滤波器 热光效应 |
Tunable filter based on silicon-on-insulator microring resonator |
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| JIANG Hong-wei and WU Yuan-da. Tunable filter based on silicon-on-insulator microring resonator[J]. Journal of Optoelectronics·laser, 2011, 0(6): 813-815 |
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| Authors: | JIANG Hong-wei and WU Yuan-da |
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| Affiliation: | Center for Educational Technology,Jilin Institute of Physical Education,Changchun 130022,China; State Key Lab.of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Lab.of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China |
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| Abstract: | Microring-resonator filters are fabricated by E-beam photolithography and inductive-coupled-plasma(ICP) etching technology.The cross-section size of the strip waveguides is 300 nm×320 nm,and the bending radius of the microring is 5 μm.The measured results show that the free spectral range(FSR) and extinction ratio(ER) at the wavelength of 1 550 nm are 16.8 nm and 18.1 dB,respectively.After thermo-optic modulation,the tunable filter wavelength range reaches 4.8 nm,and the tuning efficiency is 0.12 nm /℃. |
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| Keywords: | silicon-on-insulator(SoI) nanowire waveguide microring resonator(MRR) filter thermo-optic effect |
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