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SoI基微环谐振可调谐滤波器
引用本文:姜宏伟,吴远大. SoI基微环谐振可调谐滤波器[J]. 光电子.激光, 2011, 0(6): 813-815
作者姓名:姜宏伟  吴远大
作者单位:吉林体育学院现代教育技术中心; 中国科学院半导体研究所,集成光电子学国家重点联合实验室;;中国科学院半导体研究所,集成光电子学国家重点联合实验室;
基金项目:国家“863”计划资助项目(2007AA03Z420);国家自然科学基金资助项目(60977045)
摘    要:采用电子束光刻和ICP刻蚀等工艺制作出绝缘体上Si(SoI)基纳米线波导微环谐振(MRR)滤波器,波导截面尺寸为300 nm×320 nm,微环半径为5 μm.测试结果表明,器件的自由频谱宽度(FSR)为16.8nm,1.55μm波长附近的消光比(ER)为18.1 dB.通过对MRR滤波器进行热光调制,在21.4~60...

关 键 词:绝缘体上Si(SoI)  纳米线波导  微环谐振(MRR)  滤波器  热光效应

Tunable filter based on silicon-on-insulator microring resonator
JIANG Hong-wei and WU Yuan-da. Tunable filter based on silicon-on-insulator microring resonator[J]. Journal of Optoelectronics·laser, 2011, 0(6): 813-815
Authors:JIANG Hong-wei and WU Yuan-da
Affiliation:Center for Educational Technology,Jilin Institute of Physical Education,Changchun 130022,China; State Key Lab.of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China;State Key Lab.of Integrated Optoelectronics,Institute of Semiconductors,Chinese Academy of Sciences,Beijing 100083,China
Abstract:Microring-resonator filters are fabricated by E-beam photolithography and inductive-coupled-plasma(ICP) etching technology.The cross-section size of the strip waveguides is 300 nm×320 nm,and the bending radius of the microring is 5 μm.The measured results show that the free spectral range(FSR) and extinction ratio(ER) at the wavelength of 1 550 nm are 16.8 nm and 18.1 dB,respectively.After thermo-optic modulation,the tunable filter wavelength range reaches 4.8 nm,and the tuning efficiency is 0.12 nm /℃.
Keywords:silicon-on-insulator(SoI)  nanowire waveguide  microring resonator(MRR)  filter  thermo-optic effect
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