| 低电压驱动的MEMS F-P可调光学滤波器研究 |
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| 引用本文： | 翟雷应,徐静,李四华,吴亚明.低电压驱动的MEMS F-P可调光学滤波器研究[J].光电子．激光,2011(7):965-971. |
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| 作者姓名： | 翟雷应 徐静 李四华 吴亚明 |
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| 作者单位： | 中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室； 中国科学院研究生院；;中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室；;中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室； 中国科学院研究生院；;中国科学院上海微系统与信息技术研究所微系统技术重点实验室传感技术联合国家重点实验室； |
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| 基金项目： | 国家“863”计划资助项目(2008AA03Z406,2009AA03Z443);国家自然科学基金资助项目(608-77066) |
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| 摘 要： | 基于微机电系统（MEMS）技术,研制了一种新颖的光学腔与静电驱动器分离的Fabry-Pérot（F-P）可调谐滤波器。从光学设计、MEMS结构设计、制造工艺与器件测试等开展了F-P可调谐滤波器的研究,成功制备了工作在以1550 nm波长为中心、调谐范围为40 nm和驱动电压低于30 V的MEMS F-P可调滤波器。测试...
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| 关 键 词： | 微机电系统(MEMS) Fabry-Pérot(F-P)腔 可调光滤波器 静电驱动 |
Study on tunable MEMS FP optical filter with low actuated voltage |
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| ZHAI Lei-ying,XU Jing,LI Si-hua and WU Ya-ming.Study on tunable MEMS FP optical filter with low actuated voltage[J].Journal of Optoelectronics·laser,2011(7):965-971. |
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| Authors: | ZHAI Lei-ying XU Jing LI Si-hua and WU Ya-ming |
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| Affiliation: | Science and Technology on Micro-system Laboratory,State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China; Graduate University,Chinese Academy of Sciences,Beijing 100039,China;Science and Technology on Micro-system Laboratory,State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China;;Science and Technology on Micro-system Laboratory,State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China; Graduate University,Chinese Academy of Sciences,Beijing 100039,China;Science and Technology on Micro-system Laboratory,State Key Laboratory of Transducer Technology,Shanghai Institute of Microsystem and Information Technology,Chinese Academy of Sciences,Shanghai 200050,China; |
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| Abstract: | Based on the micro-electromechanical system(MEMS)technology,a novel tunable Fabry-Perot(F-P) filter fabricated with the independent optical cavity and electrostatic actuator is presented in this paper.The driven voltage of the tunable F-P filter is reduced largely in the design.The optical design,structure design,MEMS manufacturing process and device test are carried out,and the MEMS FP filters are fabricated successfully.The test results show that the device gets the performance of 40 nm tuning... |
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| Keywords: | micro-electromechanical system(MEMS) Fabry-Perot(F-P) cavity tunable optical filter electrostatic driven |
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